Recently, a research team successfully developed a series of CoNi-metal-organic framework (MOF) nanozymes with laccase-like activity using a gas-liquid interface dielectric barrier discharge (DBD) low ...

Stringent process control become an issue of growing importance in the integrated circuits manufacture. The in-suit monitoring and endpoint detection of very deep submicron meter size polysilicon gate ...

In this work we present the suitability of using the optical emission spectroscopy (OES) as real-time monitoring of the reactive ion etching (RIE) process. Selecting the proper wavelength (520nm), we ...