The three-electrode design was patterned directly onto a 75 μm thick polyimide film by a CO 2 laser (Figure 1 A,B). The PB–CS coating was electrodeposited onto the working electrode (Figure 1 C), ...

A MEMS flow sensor, an electrical wiring, and a flow tube structure were integrated onto the same substrate, for the first time. A Cu on polyimide (COP) was used as the sensor substrate. First, both ...