This is the second of a three-part series on micro-electromechanical systems (MEMS) sensor technology. In the first part, a general introduction to MEMS sensing was given, including its underlying ...

Recently, the progress of uncooled infrared (IR) sensors has been remarkable due to microelectronic systems (MEMS)-based pixel structure, in which free standing thermal isolation structures are ...

This work reports a multiple-parameter decoupling (MPD) method based on resonant MEMS sensors subject to blue-sideband excitation (BSE), thus enabling simultaneous separation of the cross-coupled ...

The sensor is being developed by Frequency Electronics Inc. under subcontract to Leidos and in collaboration with MIT Lincoln Lab. Compared to classic magnetometers, which tend to drift due to ...

Gas sensors for rapid identification of formaldehyde (HCHO) exposure risks are of great significance, given the volatility, toxicity, and near-imperceptibility of HCHO. However, the precise design of ...