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Process validation is often viewed as a costly regulatory formality. However, it is actually a strategic investment that, ...

A number of international, national and industry standards describe processes and process models. Process models are developed for a range of purposes including process implementation and assessment.

Abstract: Iso-dense loading including critical dimension (CD), depth and profile etc. is becoming a challenge for both Logic front-end-of-line (FEoL) and back-end-of-line (BEoL) patterning due to the ...