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This paper presents an in-chip thermal-isolation technique for a micro-ovenized microelectromechanical-system resonator. Resonators with a microoven can be used for high-precision feedback control of ...
A novel means of metal packaging of a fiber Bragg grating (FBG) sensor using stainless steel and tin, together with high temperature resistant samarium cobalt (SmCo) magnet is proposed in this paper.