This paper describes a novel paramagnetic sensor for oxygen measurement fabricated in MEMS technology. The sensor is based on the paramagnetic characteristics of oxygen using a permanent magnet for ...

This letter presents a CMOS compatible micro flow sensor (MFS) that operates in a thermal feedback (TF) mode. The proposed MFS contains four parallel polysilicon resistors on the micro bridges. The ...

A legal group is questioning why a key pollutant was omitted from air quality tests near xAI's data center.