Automotive MEMS Sensor Market. The global Automotive MEMS Sensor Market is projected to grow significantly from an estimated ...

This paper uses a microelectromechanical system (MEMS)-based force sensor to measure the forces produced by a microcantilever when deformed and a piezoelectric tube-based nanopositioner to displace ...

Abstract: We describe a computer-controlled stroboscopic phase-shifting interferometer system for measuring out-of-plane motions and deformations of MEMS structures with nanometer ... of the system ...