Achieving cleanroom certification is a non-negotiable for electronics and pharmaceutical companies. But to meet cleanroom standards, manufacturers must be able to accurately measure the conditions of ...

A resonant differential pressure sensor based on bulk silicon technology was put forward in this study. SOI-MEMS technology was employed to fabricate sensor die. A SOI wafer for differential pressure ...

Differential pressure sensors employ a metallic measuring cell at their core, which provides several significant advantages.

Differential pressure sensors are central to maintaining these pressure differentials. They have been specifically designed to precisely measure pressure differences between the clean room and ...

In situ combustion (ISC) has received much attention in the area of the development of shale oil reservoirs in recent years. The primary mechanism of interest for ISC is the oxidation kinetics of the ...

This paper presents a high-sensitivity micromachined resonant differential pressure sensor based on bulk silicon. The sensor includes a sensing unit made of a SOI wafer, which is vacuum packaged by a ...

IIIF provides researchers rich metadata and media viewing options for comparison of works across cultural heritage collections. Visit the IIIF page to learn more. One of these two components consists ...