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Nikolaev Institute of Inorganic Chemistry, SB RAS, Akad. Lavrentieva Avenue 3, Novosibirsk 630090, Russian Federation, Bavarian Geo-Institute, University of Bayreuth, Universitaetstrasse 30, 95447 ...
Abstract: This letter reports on a nano-electro-mechanical system (NEMS) pressure sensor with p-doped silicon nanowires (average cross-sectional area ~100 nm 2) as piezoresistive sensing elements.
Abstract: In this paper, a fiber Bragg grating (FBG) pressure sensor was designed and fabricated using 3D printing method for the measurement of vertical pressure. The raw material used for the ...
Micro Nano System Research Center, Key Lab of Advanced Transducers and Intelligent Control System of the Ministry of Education and College of Information and Computer, Taiyuan University of Technology ...
State Key Laboratory of Flexible Electronics (LoFE) & Institute of Advanced Materials (IAM), Nanjing University of Posts & Telecommunications (NUPT), 9 Wenyuan Road, Nanjing 210023, P. R. China ...