At 65nm, TSMC provided a reference flow that supported CMP modeling, and to meet the expected customer demand, all three major EDA vendors invested in CMP modeling solutions. However, advancement in ...

This article explores three types of process data analytics useful in ensuring high CMP yields: electrochemical analysis during blending, in-line process chemistry monitoring and particle size ...

Both the YieldEnhancer and Analyzer tools are available now. Model-building tools for users who do their own CMP modeling are available in Calibre WORKbench. And Mentor reports that the entire flow ...

At over $2.0B for all CMP consumable segments, 2014 CMP slurry and pad revenues are up 6.0% over 2013, and are projected to be up an additional 4.3% in 2015, according to a new report , CMP ...

In addition layout parameters other than density influence the deposition profile and the final topography. The new approach is a model-based metal fill method and the complete optimization flow for ...

Traditional CMP consumable products largely rely on polycrystalline synthetic diamonds. However, the newly launched single-crystal diamond disk achieves an extreme pyramid tip structure through ...